ALD-1200X-R-4 is a 4" rotation tube furnace combining with two-channel ALD valves and one channel liquid-vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery to make the surface coating on powder by both ALD and CVD. The smart design makes ALD more cost-effective and affordable for every research group.

SPECIFICATIONS:

Control Panel	All parameters of Vapor, ALD, and Gas flow are integrated into one mobile cart and controlled by PLC via a 6" touch screen panel:  Two-Channel ALD valve For channels MFC gas delivery  Please click the picture below to see control interface
ALD valve	Two ALD valves with pulse controller (min 10 ms duration ) Capable of heating with thermal actuators
Liquid-Vapor Generator	Automatic liquid-vapor generator is included and connects to ALD valve
Rotation furnace	Max 1100ºC for continuous heating Two programmable precision digital temperature controllers with 30 segments. Input power: 208 – 240V AC input, a single phase at max. 4KW Rotation speed: 0 - 10 RPM 4" quartz Tube as the drawing below  Four Mixing Blades Dimension
Anti-corrosive Pressure Gauge	3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent  High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Easy to exchange plug & play sensor element Click the picture to view detail spec.
Vacuum Pump  ( optional)	10E-2 Torr vacuum can be achieved inside the processing tube The vacuum pump is not included, suggest you order a dry pump for CVD process by click picture below
More Bubbler Optional	Click the picture below to order bubbler or evaporator for CVD, and below right ( 1-2) for Constant pressure control module( Pic.right 2) Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra cost
Compliance	CE Certified NRTL or CSA certification is available upon requesat extra cost.
Application Notes Click here to learn how to a gas regulator	Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C Click here to learn how to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
Application	Using ALD to significant decrease the high solid-solid interfacial impedance between the garnet electrolyte and electrode materials. Related Article: Negating interfacial impedance in garnet-based solid-state Li metal batteries