This is a pair of sealing flange with the water cooling jacket valve for OD 100- 102 mm ( 4" ) diameter processing tube. If you cannot use a ceramic block in two ends of the tube, you must use the water cooling jacket to keep the flange cool (otherwise silicone o-ring may get damaged)
SPECIFICATIONS
Features |
- Made of Stainless Steel with double high-temperature silicon O-rings on the flange.
- Stainless steel needle valve with 1/4" pipe adapter.
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The assembly kit will seal both ends of a 100-102 mm diameter ceramic and quartz tube.
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A vacuum gauge is installed on one side of the flange.
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Max. The furnace working temperature is 1150°C without thermal block if the tube furnace is installed with this water cold flange.
- You may choose the left side, the right side, and the full set of the flange at the product option bar
- Please always use a recirculating water chiller ( see related product below ) to save water.
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| Vacuum level |
- 10E-2 torr by a mechanical pump
- 10E-5 torr by a small turbopump and
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10-6 torr by hi-speed turbopump
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Options |
- Please click here to order digital vacuum gauge for precision vacuum control up to 10-4 torr
- For CVD application, please choose anti-corrosive vacuum gauge ( click pic below left 2 )
- You can choose the various end of fitting as options ( click here to order separately )
- You may click here order a flowmeter to control gas flowing
- You may order flange support to avoid tube turning ( picture below right)
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Warning
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- Must put a refractory tube block in front of the flange (see picture below) to avoid heat radiation melt silicone O-ring. You may order a ceramic block in related products.
- Please do not over tighten the three hex screws on the flanges to avoid overpressure incidents. The recommended torque is 35~40 inch-lbs.
- For liability considerations, MTI does not recommend or endorse the use of any toxic, flammable or corrosive gases with our flange assemblies. Please contact us with any concerns.
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| Options |
Click here to choose flange for tube from 1" to 11" Vacuum Pump & High Vacuum Station
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