Power

• Input: 208 - 240VAC, 30 A, 50/60 Hz, single phase
• 5 KVA
  
• Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )

Vacuum Chamber

• Stainless steel chamber:  300mm ID. x 360 mm H, electropolished
• 100 mm observation window
• Hinged front door for easy sample loading
• Motorized shutters for each evaporation source
• One ISO-100K port for connection with a turbo pump and a gate valve.
• One KF16 port to connect the vacuum gauge
• One KF40 port
• Six CF35 ports to connect a necessary device (e.g., film thickness monitor (QCM))

• 260 L/s turbo molecular pump
• Vacuum level: 5.0x10^-6 Torr ( after 40 minutes of pumping if the chamber is backfilled with dry nitrogen and exposed to air in a short time)
• Ultimate vacuum: 5.0x10^-7  Torr ( after bake out at 100 -150°C)
• Leaking rate:  6.7×10-8 Pa·L/S
• Vacuum Port: DN 100 ISO-K (standard), DN160 ISO-K (optional)
• A mechanical pump (YTP-550-LD) is required as a backing pump to achieve the vacuum level of <1e-2 torr initially

• Four tungsten heating boats with water-cooled shrouds
• Tungsten heating boat, 70L x 12W x 3H (mm). 
• Ø120 mm rotary sample holder
• Evaporation distance from source to sample holder is 140-200 mm
• The sample stage with a heating function (up to 500 °C) is optional upon request

Thickness measurement

(Optional)

• Quartz crystal microbalance is optional for thickness measurements
• The accuracy of thickness control is 1.0 Angstrom.

• Vacuum, thickness, and power control are integrated into one control box
  

Chilled Water

(Optional)

• Chilled Water 30-60 psig (0.2 - 0.4 MPa), 15°C - 25 °C
• MTI recommends using a recirculating water chiller, KJ5000. 

Certificate