Input Power

• Input: AC220V±10%, three-phases, 50/60 Hz
• Total Power required: 8 KW (~32A)
  

Vacuum Chamber

• Stainless steel (SS304) chamber:  400mm ID. x 400 mm D x 450 mm H, polished finish. 
• 100 mm observation window
• Hinged-type door for easy sample loading
• Motorized shutters for each evaporation boat, 
• One ISO-100K port for connection with a turbo pump and a gate valve.

• 260 L/s turbo molecular pump
  • Vacuum level: 5.0x10^-6 Torr ( after 40 minutes of pumping )
  • Limit vacuum: 5.0x10^-7  Torr ( after baking at 100 -150°C)
  • Leaking rate: 5.0x10^-7 Pa.
  • Vacuum Port: DN 100 ISO-K

A mechanical pump (YTP-550-LD) is required as a backing pump to initially achieve the vacuum level of <1e-2 torr

Four evaporation sources are included

•      One tungsten heating boat with water-cooling without temperature control for high temperature coating up to 2000 °C.   Tungsten heating boat, 70L x 12W x 3H (mm). 
•     Three resistance coil-heated crucibles for low-temperature coating up to 500 °C with precision temperature control 
  
• Sample holder can accept a maximum sample of 150*150mm. Rotation speed: 0-30 rpm
• Evaporation distance from source to sample holder is up to 60 mm
• The sample stage with a heating function up to 700 °C

• Quartz crystal microbalance is optional for thickness measurements
• The accuracy of thickness control is 1.0 Angstrom.

• Vacuum, thickness, and power control are integrated into one control box
• The Control Unit is separated from the vacuum chamber for easy moving
  

• The coater can be connected to a single glovebox or  placed inside a double glovebox with the slide door

Facility Requirement 

• Space: 250 SF with height > 6 feet
  
• Chilled Water: > 16L/minute flowing water required for electrode cooling or using a recirculating water chiller

Application Notes

• Please check the fabrication process in detail below:
• https://mtixtl.com/collections/perovskite-solar-cells

Certificate