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1100°C 8.5" Quartz Tube Furnace with Water Cooling Flanges (24" heating zone) - GSL1100X8

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1100°C 8.5" Quartz Tube Furnace with Water Cooling Flanges (24" heating zone) - GSL1100X8

GSL1100X8 is a single heating zone tube furnace with an 8.5" quartz tube for CVD process of large samples or wafers.

Features
  1. Working temperature up to 1100°C
  2. Effective heating area Ø208×600 mm
  3. Programmable PID temperature control up to 30 segments
  4. Water-cooled hermetic flanges for controlled atmosphere
SPECIFICATIONS:
Power
  • 208 - 240VAC, 50 A, 50/60 Hz, 8 kVA. 
Furnace structure
  • Double-layer steel casing with cooling fans to keep the furnace surface temperature < 70°C
  • High purity alumina fibrous insulation for max thermal insulation.
Working pressure
  • < 3 psig
Heating element
  • NiCrAl Resistance Wire

Working Temperature
  • Max. heating temperature: 1100°C
  • Continuous working temperature: 400 -1050°C
  • Max. heating rate: 20°C/min
  • Recommended heating rate: <10°C/min
Heating Area
  • Total heating zone length: 600mm (24'')
  • Constant temperature zone: 200mm within +/-5°C
Temperature Controller
  • MTI programmable PID temperature controller with 30 segments.
  • A secondary temperature monitor over-heating and broken thermocouple alarm. 
  • Dual K type thermocouple for control and monitor. 
  • Temperature control accuracy: +/-1°C
  • Eurotherm 3000 series temperature controller (Optional)
    • Name brand temperature controller for enhanced control accuracy and stability. 
Processing Tube 
  • Quartz tube, 216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L)
Thermal Blocks
  • Alumina-silicate fibrous thermal insulation blocks.
Hermetic Flanges
  • Hinged type stainless steel hermetic flange with water cooling 
  • Pressure gauge ranges from -0.1 - 0.15 MPa
  • 1/4" compression tube gas inlet and outlet
  • 1/4" thermocouple feedthrough port
  • KF25 vacuum port. 
 
Remote Control and Communication (optional)
  • Complementary LabVIEW Based Temperature Control Software (MTS03) enables the user to edit temperature profiles, manage heat-treatment recipes, and log temperature data. 
  • Communication chip and RS-485 communication cable (MTS01) is optional for purchase.
Water Chiller (Optional)
  • Cooling water is required
    • ≥ 10L/min, 5-30ºC, 10-60 PSI.
  • MTI recommends using a KJ5000 recirculating water chiller
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request.

 

CONSUMABLE PARTS LIST
No. Description Quantity Picture GSL-1100X-8.5-S-UL
01 Quartz tube 1 pc

216 OD x 208 ID x 1020L mm
02

Alumina-silicate fibrous thermal insulation blocks.

 1 pair f-t-block-206
03 O ring for inner flange 2 pcs SOR-213
04 O ring for flange cap 4 pcs SOR-230

 

$8,713.60

Original: $24,896.00

-65%
1100°C 8.5" Quartz Tube Furnace with Water Cooling Flanges (24" heating zone) - GSL1100X8—

$24,896.00

$8,713.60

Product Information

Shipping & Returns

Description

GSL1100X8 is a single heating zone tube furnace with an 8.5" quartz tube for CVD process of large samples or wafers.

Features
  1. Working temperature up to 1100°C
  2. Effective heating area Ø208×600 mm
  3. Programmable PID temperature control up to 30 segments
  4. Water-cooled hermetic flanges for controlled atmosphere
SPECIFICATIONS:
Power
  • 208 - 240VAC, 50 A, 50/60 Hz, 8 kVA. 
Furnace structure
  • Double-layer steel casing with cooling fans to keep the furnace surface temperature < 70°C
  • High purity alumina fibrous insulation for max thermal insulation.
Working pressure
  • < 3 psig
Heating element
  • NiCrAl Resistance Wire

Working Temperature
  • Max. heating temperature: 1100°C
  • Continuous working temperature: 400 -1050°C
  • Max. heating rate: 20°C/min
  • Recommended heating rate: <10°C/min
Heating Area
  • Total heating zone length: 600mm (24'')
  • Constant temperature zone: 200mm within +/-5°C
Temperature Controller
  • MTI programmable PID temperature controller with 30 segments.
  • A secondary temperature monitor over-heating and broken thermocouple alarm. 
  • Dual K type thermocouple for control and monitor. 
  • Temperature control accuracy: +/-1°C
  • Eurotherm 3000 series temperature controller (Optional)
    • Name brand temperature controller for enhanced control accuracy and stability. 
Processing Tube 
  • Quartz tube, 216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L)
Thermal Blocks
  • Alumina-silicate fibrous thermal insulation blocks.
Hermetic Flanges
  • Hinged type stainless steel hermetic flange with water cooling 
  • Pressure gauge ranges from -0.1 - 0.15 MPa
  • 1/4" compression tube gas inlet and outlet
  • 1/4" thermocouple feedthrough port
  • KF25 vacuum port. 
 
Remote Control and Communication (optional)
  • Complementary LabVIEW Based Temperature Control Software (MTS03) enables the user to edit temperature profiles, manage heat-treatment recipes, and log temperature data. 
  • Communication chip and RS-485 communication cable (MTS01) is optional for purchase.
Water Chiller (Optional)
  • Cooling water is required
    • ≥ 10L/min, 5-30ºC, 10-60 PSI.
  • MTI recommends using a KJ5000 recirculating water chiller
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request.

 

CONSUMABLE PARTS LIST
No. Description Quantity Picture GSL-1100X-8.5-S-UL
01 Quartz tube 1 pc

216 OD x 208 ID x 1020L mm
02

Alumina-silicate fibrous thermal insulation blocks.

 1 pair f-t-block-206
03 O ring for inner flange 2 pcs SOR-213
04 O ring for flange cap 4 pcs SOR-230

 

1100°C 8.5" Quartz Tube Furnace with Water Cooling Flanges (24" heating zone) - GSL1100X8 | MTI Online Store