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1200C Tube Furnace w/ Internal Sample Sliding by Magnet for DVD & RTP - OTF-1200X-S-DVD

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1200C Tube Furnace w/ Internal Sample Sliding by Magnet for DVD & RTP - OTF-1200X-S-DVD

OTF-1200X-S-DVD is a compact 2" tube furnace with a sample sliding inside the tube via magnet manually, which is designed for direct vaporizing deposition (DVD) or rapid thermal processing (RTP) under various atmospheres for 2D material growth with max. the working temperature of 1200°C


SPECIFICATIONS:

Furnace Feature
  • One high thermal conductivity Alumina flat sample holder (2" Lx1"W) is fixed on K type sample, and the thermal couple with the sample holder can be moved inside a quartz tube driven by a magnet manually to find a desirable temperature position inside the tube for evaporation or deposition.
  • One NIST-certified precision temperature monitor is connected to the thermal couple and sample holder via feedthrough on the vacuum flange.
  • One magnet is embedded inside the thermal block, and another magnet is placed outside the tube. move the outside magnet can move the sample holder with the thermal couple inside the tube in or out
  • 30-segment programmable temperature controller is installed in a furnace to set up Max. working temperature up to 1200oC at the center of the furnace
  • One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application.
Furnace Power 
  • 110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when placing order )
  • 1.5 KW
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C ( continuous)
Max. Heating Rate
<= 20 °C/min
Heating Zone
  • Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
  • Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C 
  • You shall measure the furnace temperature profile for your own application before making film growth.
Temperature Controller
  • PID automatic control via solid-state relay with 30 steps programmable
  • Built-in Over Temperature and Thermocouple Failure Protection
  • Optional: The furnace may be operated by PC with the installation of a control module. Please order a MTS02-B control module at extra cost. 
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo


Tube Size
  • 2" quartz tube (50mm O.D x 44mm I.D x 1000mm L) 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • One small quartz boat is included for placing samples or evaporation materials.
1         other size crucibles
Vacuum Flanges
 
2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port, click picture on the right to see details )
Vacuum Level
10-2torr (by mechanical pump)
 
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the end of the vacuum port ( click picture left to order )
  • You may consider ordering a quick connecting flange at extra cost.
  • You may order a multi-channel gas delivery system for DVD or CVD operation.
                       
Compliance
  • CE Certified
  • NRTL or CSA certification is available at extra cost. please click marks below to learn details )
Application Notes


Click here to learn the installation of a gas regulator

 

$4,998.00
1200C Tube Furnace w/ Internal Sample Sliding by Magnet for DVD & RTP - OTF-1200X-S-DVD—
$4,998.00

Product Information

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Description

OTF-1200X-S-DVD is a compact 2" tube furnace with a sample sliding inside the tube via magnet manually, which is designed for direct vaporizing deposition (DVD) or rapid thermal processing (RTP) under various atmospheres for 2D material growth with max. the working temperature of 1200°C


SPECIFICATIONS:

Furnace Feature
  • One high thermal conductivity Alumina flat sample holder (2" Lx1"W) is fixed on K type sample, and the thermal couple with the sample holder can be moved inside a quartz tube driven by a magnet manually to find a desirable temperature position inside the tube for evaporation or deposition.
  • One NIST-certified precision temperature monitor is connected to the thermal couple and sample holder via feedthrough on the vacuum flange.
  • One magnet is embedded inside the thermal block, and another magnet is placed outside the tube. move the outside magnet can move the sample holder with the thermal couple inside the tube in or out
  • 30-segment programmable temperature controller is installed in a furnace to set up Max. working temperature up to 1200oC at the center of the furnace
  • One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application.
Furnace Power 
  • 110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when placing order )
  • 1.5 KW
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C ( continuous)
Max. Heating Rate
<= 20 °C/min
Heating Zone
  • Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
  • Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C 
  • You shall measure the furnace temperature profile for your own application before making film growth.
Temperature Controller
  • PID automatic control via solid-state relay with 30 steps programmable
  • Built-in Over Temperature and Thermocouple Failure Protection
  • Optional: The furnace may be operated by PC with the installation of a control module. Please order a MTS02-B control module at extra cost. 
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo


Tube Size
  • 2" quartz tube (50mm O.D x 44mm I.D x 1000mm L) 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • One small quartz boat is included for placing samples or evaporation materials.
1         other size crucibles
Vacuum Flanges
 
2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port, click picture on the right to see details )
Vacuum Level
10-2torr (by mechanical pump)
 
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the end of the vacuum port ( click picture left to order )
  • You may consider ordering a quick connecting flange at extra cost.
  • You may order a multi-channel gas delivery system for DVD or CVD operation.
                       
Compliance
  • CE Certified
  • NRTL or CSA certification is available at extra cost. please click marks below to learn details )
Application Notes


Click here to learn the installation of a gas regulator