AlN  Template on saphhire is made by a Plasma Vapor Deposition of NanoColumns (PVDNC)-based method.  AlN template is a cost effective way to replace AlN single crystal substrate.

Specifications

• Sizes:                                                    2" round
•  Substrate Sapphire Orientation:               C plane 0.20° offcut towards m-plane
• Type and Doping  for the AlN film             Undoped
• Macro Defect Density:                             <5 cm^-2
• Front Surface Finish (Al Face):                 As-grown
  
• Back Surface Finish Sapphire:                  as-received finish
• Useable Surface Area:                              >90% 
• Edge Exclusion Area:                               1mm
• Package:                                                 Single Wafer Container
• AlN layer thickness:                                 1000 nm +/- 5%
  
• Polish:                                                     Both sides polished
  

•   AlN MSDS
  
  
   

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