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1100°C 3 Zone Tube Furnace with 8.5" - 11" OD x L 35.4" Tube and Flange - GSL-1100X-XX-III

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1100°C 3 Zone Tube Furnace with 8.5" - 11" OD x L 35.4" Tube and Flange - GSL-1100X-XX-III

GSL-1100X-XX-III furnace is a three-zone tube furnace with 8.5" or 11"O.D quartz tube and vacuum flanges designed for wafer processing
Features
  • Up to 1100°C
  • Three zone, 300 + 300 + 300 mm heating length ( 35.4"L)
  • Choice of tube size from 8.5" to 11" OD 
  • PID programmable temperature controller
  • Hermetic stainless steel flanges

SPECIFICATIONS

Model GSL-1100X-8.5-III GSL-1100X-11-III
Quartz Tube
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
Quartz boats (optional) Max. 6" wafer boat  Max 8" wafer boat
Power
  • 208-240VAC, single-phase, 50/60 Hz, 40 A
  • 380, 400, 415, 480 VAC, three-phase, is also available upon request
Furnace structure
  • Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation 
  • Heating element: FeCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included 
    Quartz baffle blocks are optional for wafer annealing and diffusion.

Heating Length
  • Total heating length 900 mm (36")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone:
Uniform Heating Length
  • 600 mm +/- 3°C if all three zones set to 800°C
  • +/- 3 °C across the cross-section @ 800°C
Working temperature
  • ≤1200°C, ≤1 hour
  • ≤1100°C, continuously 
  • Max heating & cooling rate: 10°C/min
Temperature Controller
  • Three PID temperature controller
  • 30 programmable temperature segments
  • Control accuracy: +/- 1°C
  • Eurotherm 3000 series temperature controllers with ± 0.1ºC accuracy is available upon request at the extra cost
Thermocouple
  • dual K-type thermocouple for each zone
Flanges
  • A pair of water-cooled stainless steel hermetic flanges (hinged style)
  • Left Side Flange: Vacuum gauge, stainless steel needle valves, and 1/4" tube gas inlet, 
  • Right Side Flange: KF40 vacuum port, 1/4" OD quick-connect port
Pressure
  • ≤ 3 psig
Vacuum
  • < 5e-2 torr by a mechanical pump
  • Turbo pump connection is also available. Please contact MTI for details
Chilled Water
  • 5-30 °C distilled water
  • >16 L/min
  • <80 psig
Software (Optional)
  • Labview Based Temperature Control System (MTS03) for recipe editing, furnace control, monitoring, and data logging.
Compliance
  • NRTL or CSA certification is available upon request, 

CONSUMABLE PARTS LIST

No. Description Quantity Picture GSL-1100X-6-III GSL-1100X-8.5-III GSL-1100X-11-III
01 Quartz tube 1 pc
152 O.D x 143 I.D x 1300mm L
(6" O.D x 5.6" I.D x 51" L) 		216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L) 		279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
02 Hinged type vacuum sealing assembly 1 set
FL-152 FL-213 FL-278
03 O ring for flange cap 2 pcs
SOR-152 SOR-213 SOR-278
04 O ring for inner flange 4 pcs
SOR-168 SOR-230 SOR-295
05 KF-40 quick clamp 2 pcs
KF-Clamp-D40
07 KF-40 Blank flange 2 pcs
KF-BF



Select tube size
From $29,860.00
1100°C 3 Zone Tube Furnace with 8.5" - 11" OD x L 35.4" Tube and Flange - GSL-1100X-XX-III—
$29,860.00

Product Information

Shipping & Returns

Description

GSL-1100X-XX-III furnace is a three-zone tube furnace with 8.5" or 11"O.D quartz tube and vacuum flanges designed for wafer processing
Features
  • Up to 1100°C
  • Three zone, 300 + 300 + 300 mm heating length ( 35.4"L)
  • Choice of tube size from 8.5" to 11" OD 
  • PID programmable temperature controller
  • Hermetic stainless steel flanges

SPECIFICATIONS

Model GSL-1100X-8.5-III GSL-1100X-11-III
Quartz Tube
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
Quartz boats (optional) Max. 6" wafer boat  Max 8" wafer boat
Power
  • 208-240VAC, single-phase, 50/60 Hz, 40 A
  • 380, 400, 415, 480 VAC, three-phase, is also available upon request
Furnace structure
  • Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation 
  • Heating element: FeCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included 
    Quartz baffle blocks are optional for wafer annealing and diffusion.

Heating Length
  • Total heating length 900 mm (36")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone:
Uniform Heating Length
  • 600 mm +/- 3°C if all three zones set to 800°C
  • +/- 3 °C across the cross-section @ 800°C
Working temperature
  • ≤1200°C, ≤1 hour
  • ≤1100°C, continuously 
  • Max heating & cooling rate: 10°C/min
Temperature Controller
  • Three PID temperature controller
  • 30 programmable temperature segments
  • Control accuracy: +/- 1°C
  • Eurotherm 3000 series temperature controllers with ± 0.1ºC accuracy is available upon request at the extra cost
Thermocouple
  • dual K-type thermocouple for each zone
Flanges
  • A pair of water-cooled stainless steel hermetic flanges (hinged style)
  • Left Side Flange: Vacuum gauge, stainless steel needle valves, and 1/4" tube gas inlet, 
  • Right Side Flange: KF40 vacuum port, 1/4" OD quick-connect port
Pressure
  • ≤ 3 psig
Vacuum
  • < 5e-2 torr by a mechanical pump
  • Turbo pump connection is also available. Please contact MTI for details
Chilled Water
  • 5-30 °C distilled water
  • >16 L/min
  • <80 psig
Software (Optional)
  • Labview Based Temperature Control System (MTS03) for recipe editing, furnace control, monitoring, and data logging.
Compliance
  • NRTL or CSA certification is available upon request, 

CONSUMABLE PARTS LIST

No. Description Quantity Picture GSL-1100X-6-III GSL-1100X-8.5-III GSL-1100X-11-III
01 Quartz tube 1 pc
152 O.D x 143 I.D x 1300mm L
(6" O.D x 5.6" I.D x 51" L) 		216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L) 		279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
02 Hinged type vacuum sealing assembly 1 set
FL-152 FL-213 FL-278
03 O ring for flange cap 2 pcs
SOR-152 SOR-213 SOR-278
04 O ring for inner flange 4 pcs
SOR-168 SOR-230 SOR-295
05 KF-40 quick clamp 2 pcs
KF-Clamp-D40
07 KF-40 Blank flange 2 pcs
KF-BF



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