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1100°C Three-zone Tube Furnace w/ an 11" or 15" Quartz Tube & Hinged Flanges - OTF-1100X-III

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1100°C Three-zone Tube Furnace w/ an 11" or 15" Quartz Tube & Hinged Flanges - OTF-1100X-III

OTF-1100X-III series is a three-zone split tube furnace with optional 11" or 15" OD quartz tubes and hermetic flanges. The furnace features a pair of motorized actuator to open and close the furnace lid in an ease. Three programmable PID temperature controllers allows a smooth heating and cooling ramps with a fluctuation less than 1ºC. It has been widely used for materials synthesis, wafer annealing, diffusion, and heat treatment for bulk sample under vacuum or gas atmosphere.
Features
  • Split tube furnace design
  • Working temperature ≤ 1100°C
  • Choice of tube size: 11" or 15"
  • Three heating zones, 300 + 300 + 300 mm
  • Uniform heating length 600 mm @ +/- 5°C @800 °C 

SPECIFICATIONS

Power
  • 480 VAC, three phase, 50/60 Hz, 40 A
  • 30 kVA
  • 10-foot power cord is included. 
  • More voltage rating is also available upon request. 
Furnace structure
  • Double-layer steel casing with air cooling to keep surface temperature of the case < 70°C.
  • Motorized actuator to open and close the furnace lid in an ease
  • Refractory fibrous alumina thermal insulation
Heating zone
  • Total heating zone length 900mm 
  • Three zones: 300 mm + 300 mm + 300mm ( 900 mm in total)
  • Constant temperature zone length: 600 mm (if three zones are in the same temperature within +/- 5°C)
  • Cross-section Temperature tolerance +/- 5°C
Heating Elements
  • 42 SiC heating elements
Working Temperature
  • ≤ 1200 °C, up to 30 min
  • ≤ 1100 °C, continuously at ambient pressure
  • ≤ 900 °C, under vacuum
Heating Rate
  • ≤ 10 °C/min
  • ≤ 5 °C/min recommended
Temperature Controllers
  • Three programmable PID temperature controllers
  • 30 temperature segments
  • Control accuracy: +/- 1°C
  • RS-485 communication
Eurotherm Controllers (optional)
  • Three Eurotherm 3000 series programmable PID temperature controllers
  • 24 temperature segements
  • Control accuracy: +/- 0.1°C
  • RS-485 communication
Thermocouple
  • Type K
Quartz tube
  • 11“ or 15" ID quartz tube with 73" Length is selectable from the product option
  • 381 OD x 371 ID x 1860L mm (15"OD x 14.6" x 73"L)
  • 279 OD x 269 ID x 1860L mm (11"OD x 10.6"ID x 73"L)
Thermal Blocks
  • Two fibrous ceramic thermal blocks
  • Optional multi-quartz disk thermal blocks are available for higher vacuum at an extra cost 
Flanges
  • A pair of stainless steel elastomer sealed flanges (hinged)
  • 4 pieces of silicon O-rings
  • Left Side Flange: stainless steel needle valves, 1/4" tube gas inlet, and a pressure gauge
  • Right Side Flange: KF40 vacuum port, one 1/4" quick-connect port for in-situ temperature measurement
Pressure
  • < 3 psig
 Vacuum level
  • Vacuum level depends on the vacuum pump and thermal block materials
  • <5e-2 torr with a backing pump and alumina thermal blocks after bakeout. 
  • <1e-4 torr with a 700 L/s turbo pump and quartz thermal blocks
  • <1e-3 torr with a 700 L/s turbo pump and alumina thermal blocks. 
  • All the pressure are measured at ambient temperature. 
Installation
  • On-site installation is required
Options
  • Quartz wafer boat for 8" or 12" wafers

 

Select Tube size + Flanges
From $21,000.00

Original: $60,000.00

-65%
1100°C Three-zone Tube Furnace w/ an 11" or 15" Quartz Tube & Hinged Flanges - OTF-1100X-III—

$60,000.00

$21,000.00

Product Information

Shipping & Returns

Description

OTF-1100X-III series is a three-zone split tube furnace with optional 11" or 15" OD quartz tubes and hermetic flanges. The furnace features a pair of motorized actuator to open and close the furnace lid in an ease. Three programmable PID temperature controllers allows a smooth heating and cooling ramps with a fluctuation less than 1ºC. It has been widely used for materials synthesis, wafer annealing, diffusion, and heat treatment for bulk sample under vacuum or gas atmosphere.
Features
  • Split tube furnace design
  • Working temperature ≤ 1100°C
  • Choice of tube size: 11" or 15"
  • Three heating zones, 300 + 300 + 300 mm
  • Uniform heating length 600 mm @ +/- 5°C @800 °C 

SPECIFICATIONS

Power
  • 480 VAC, three phase, 50/60 Hz, 40 A
  • 30 kVA
  • 10-foot power cord is included. 
  • More voltage rating is also available upon request. 
Furnace structure
  • Double-layer steel casing with air cooling to keep surface temperature of the case < 70°C.
  • Motorized actuator to open and close the furnace lid in an ease
  • Refractory fibrous alumina thermal insulation
Heating zone
  • Total heating zone length 900mm 
  • Three zones: 300 mm + 300 mm + 300mm ( 900 mm in total)
  • Constant temperature zone length: 600 mm (if three zones are in the same temperature within +/- 5°C)
  • Cross-section Temperature tolerance +/- 5°C
Heating Elements
  • 42 SiC heating elements
Working Temperature
  • ≤ 1200 °C, up to 30 min
  • ≤ 1100 °C, continuously at ambient pressure
  • ≤ 900 °C, under vacuum
Heating Rate
  • ≤ 10 °C/min
  • ≤ 5 °C/min recommended
Temperature Controllers
  • Three programmable PID temperature controllers
  • 30 temperature segments
  • Control accuracy: +/- 1°C
  • RS-485 communication
Eurotherm Controllers (optional)
  • Three Eurotherm 3000 series programmable PID temperature controllers
  • 24 temperature segements
  • Control accuracy: +/- 0.1°C
  • RS-485 communication
Thermocouple
  • Type K
Quartz tube
  • 11“ or 15" ID quartz tube with 73" Length is selectable from the product option
  • 381 OD x 371 ID x 1860L mm (15"OD x 14.6" x 73"L)
  • 279 OD x 269 ID x 1860L mm (11"OD x 10.6"ID x 73"L)
Thermal Blocks
  • Two fibrous ceramic thermal blocks
  • Optional multi-quartz disk thermal blocks are available for higher vacuum at an extra cost 
Flanges
  • A pair of stainless steel elastomer sealed flanges (hinged)
  • 4 pieces of silicon O-rings
  • Left Side Flange: stainless steel needle valves, 1/4" tube gas inlet, and a pressure gauge
  • Right Side Flange: KF40 vacuum port, one 1/4" quick-connect port for in-situ temperature measurement
Pressure
  • < 3 psig
 Vacuum level
  • Vacuum level depends on the vacuum pump and thermal block materials
  • <5e-2 torr with a backing pump and alumina thermal blocks after bakeout. 
  • <1e-4 torr with a 700 L/s turbo pump and quartz thermal blocks
  • <1e-3 torr with a 700 L/s turbo pump and alumina thermal blocks. 
  • All the pressure are measured at ambient temperature. 
Installation
  • On-site installation is required
Options
  • Quartz wafer boat for 8" or 12" wafers