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1200C PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - OTF-1200X-II-PEC4

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1200C PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - OTF-1200X-II-PEC4

OTF-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on the surface).

SPECIFICATIONS:
System Structure       
  • 0~25° adjustable tilt frame assists smooth powder loading/unloading
  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces the needs for high-temperature process
  • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity 
  • Four-channel gas mixing station with MFCs provide precise control of gas delivery
  • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing
     
Two-Zone Rotary Furnace
  • Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating 
  • Two PID temperature controllers with 30 segments programmable.
  • Input Power: 208 – 240VAC, a single phase at max. 2.5KW.
  • High purity Alumina fibrous insulation for max. energy saving
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
  • The split cover enables faster cooling and easy operation
  • Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
  • Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.

Plasma RF Power Supply
  
 
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      100W max.
  • Matching:                  Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Evaporation Boat  
  • Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC)
  • 0.7ml alumina crucible with tungsten heating coil surrounded.
  • S type thermocouple inserts for accurate temperature measurement of the source material.
  • 500W DC evaporation power supply with max. operating current @ 30Amps
        
Quartz Tube
    • Standard:  4'' O.D Fused quartz processing tube, please click the pic on the left for details
    • One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
    Sealing Flanges
      
    • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting.
               Left Flange Set   Right Flange Set                         
    Tube Rotation Speed
    • 0 - 5 RPM variable
    Furnace Tilt Angle
    • 0~30°
    Vacuum Pump & Gauge
     
    • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs.
    • KF25 adapter and stainless steel bellows are connected between pump and tube flange
    • 10E-2 Torr vacuum can be achieved inside the processing tube   
    • Note: Vacuum Gauge is available at additional cost, please click underline and to order

    MFC Gas Mixing Station

      
    • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically. 
      • MFC 1: Gas flow range from 0~100 SCCM
      • MFC 2&3: Control range from 0~200 SCCM  
      • MFC 4: Control range from 0~500 SCCM
    • Gas inlet/outlet fittings: 6mm O.D tube fitting
    • Power: 208-240VAC 50/60Hz
    • Stainless steel needle valves for manual ON/OFF control of gas supply.
    • Large PLC touch screen control enables easy flow rate settings



    Temperature Control
          
    • Two heating zone design with individual temperature controller
    • Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for 
    • Built-in overheating & broken thermocouple protection.
    • Over-temperature protection and alarm allow for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • Three K-type thermocouples (one for each zone).
    • RS485 Communications Port.
    • Optional:  
      • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
    Volumetric Feeder and Collector Tank (Optional)

                                
    • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating. Please click the pic.1 on the left to order.
    • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details
    • You may add a vacuum gate valve on the top of the sample collecting tank for air-sensitive material. (Pic 3)
    $129,985.00
    1200C PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - OTF-1200X-II-PEC4—
    $129,985.00

    Product Information

    Shipping & Returns

    Description

    OTF-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on the surface).

    SPECIFICATIONS:
    System Structure       
    • 0~25° adjustable tilt frame assists smooth powder loading/unloading
    • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces the needs for high-temperature process
    • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity 
    • Four-channel gas mixing station with MFCs provide precise control of gas delivery
    • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing
         
    Two-Zone Rotary Furnace
    • Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating 
    • Two PID temperature controllers with 30 segments programmable.
    • Input Power: 208 – 240VAC, a single phase at max. 2.5KW.
    • High purity Alumina fibrous insulation for max. energy saving
    • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
    • The split cover enables faster cooling and easy operation
    • Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
    • Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.

    Plasma RF Power Supply
      
     
    • Output Power:           5 -300W adjustable with ± 1% stability.
    • RF frequency:           13.56 MHz ±0.005% stability.
    • Reflection Power:      100W max.
    • Matching:                  Automatic
    • RF Output Port:         50 Ω, N-type, female
    • Noise:                       <50 dB.
    • Cooling:                     Air cooling.
    • Power:                      208-240VAC, Single Phase, 50/60Hz
    Evaporation Boat  
    • Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC)
    • 0.7ml alumina crucible with tungsten heating coil surrounded.
    • S type thermocouple inserts for accurate temperature measurement of the source material.
    • 500W DC evaporation power supply with max. operating current @ 30Amps
            
    Quartz Tube
      • Standard:  4'' O.D Fused quartz processing tube, please click the pic on the left for details
      • One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
      Sealing Flanges
        
      • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
      • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting.
                 Left Flange Set   Right Flange Set                         
      Tube Rotation Speed
      • 0 - 5 RPM variable
      Furnace Tilt Angle
      • 0~30°
      Vacuum Pump & Gauge
       
      • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs.
      • KF25 adapter and stainless steel bellows are connected between pump and tube flange
      • 10E-2 Torr vacuum can be achieved inside the processing tube   
      • Note: Vacuum Gauge is available at additional cost, please click underline and to order

      MFC Gas Mixing Station

        
      • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically. 
        • MFC 1: Gas flow range from 0~100 SCCM
        • MFC 2&3: Control range from 0~200 SCCM  
        • MFC 4: Control range from 0~500 SCCM
      • Gas inlet/outlet fittings: 6mm O.D tube fitting
      • Power: 208-240VAC 50/60Hz
      • Stainless steel needle valves for manual ON/OFF control of gas supply.
      • Large PLC touch screen control enables easy flow rate settings



      Temperature Control
              
      • Two heating zone design with individual temperature controller
      • Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for 
      • Built-in overheating & broken thermocouple protection.
      • Over-temperature protection and alarm allow for operation without attendant(s).
      • +/- 1 ºC temperature accuracy.
      • Three K-type thermocouples (one for each zone).
      • RS485 Communications Port.
      • Optional:  
        • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
        • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
      Volumetric Feeder and Collector Tank (Optional)

                                    
      • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating. Please click the pic.1 on the left to order.
      • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details
      • You may add a vacuum gate valve on the top of the sample collecting tank for air-sensitive material. (Pic 3)