The GSL-3F-SS is designed to mix and deliver 3 different gases to the MTI CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters. 

SPECIFICATIONS

Flow rate	A: 10 - 100 mL/min B: 16 - 160 mL/min C: 25 - 250 mL/min Accuracy 4% F.S.)
Diaphragm Pressure Gauge	-0.1 - 0.15 MPa (for gas mixing tank)
Gas Mixing Tank	SS304
Gas Schematics	Three needle valves for three gas inlets One valve for a gas outlet
Gas Inlets and Outlets	1/4" compression tube fittings 12' length 1/4" PTFE pipe is included for immediate use
Dimenstions	600 mm (L) x 600 mm (W) x 650 mm ( H)
Optionals	CVD & PECVD Furnace Bubbler or evaporator for CVD
Load limit	400 lbs