✨ New Arrivals Just Dropped!Explore
HomeStore

Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S

Product image 1
1 / 2

Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S

GSL-2Z-LCD-S is a compact two-channel gas mixer that is designed for the control of 2 types of gasses flowing through vacuum-sealed tube furnaces at a low cost.

SPECIFICATIONS

Mass Flow Controller inside

Note: Other range MFC can be customized at extra cost upon request. 
  • Two Precision Mass Flow Controller ( MFC) inside )
  • Working Temp. : 5~45 ºC
  • Max. Pressure: 3x106 Pa
  • Accuracy: ±1.5% FS
  • Liner: ±0.5-1.5%F.S.
  • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 1~ 99 SCCM
    • Controller 2: 1~199 SCCM

Power
  • Voltage: AC 208 - 240V Single phase 50/60Hz
  • Power: 100 W in total
  • May order a 100W transformer to operate at 110VAC ( Click Pic below to order )

PLC Touch Screen

  • 6" color touchscreen control panel to make parameter setting easy.
  • Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. 
Mechanical Pressure Gauge Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve 316 Stainless Steel
Gas Pipeline
  • One stainless steel gas mixing tank is built-in
  • Internal pipeline: 1/4" O.D stainless steel
  • External pipeline: 1/4" O.D PTFE
  • Gas Mixing Tank: Φ80X120mm
  • Stop Valve & Fittings
    • 316 stainless steel needle valve, 
    • Φ1/4” Swagelok Tube Fitting
Compliance
  • All components are CE certified
  • NRTL (UL61010) or CSA certification is available at extra cost. 
Oxygen Monitoring ( Optional)
  • An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more:
Related Products
 CVD & PECVD                              Furnace Click pictures below to order bubbler or evaporator for CVD
                                                                  

 

$7,998.00
Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S—
$7,998.00

Product Information

Shipping & Returns

Description

GSL-2Z-LCD-S is a compact two-channel gas mixer that is designed for the control of 2 types of gasses flowing through vacuum-sealed tube furnaces at a low cost.

SPECIFICATIONS

Mass Flow Controller inside

Note: Other range MFC can be customized at extra cost upon request. 
  • Two Precision Mass Flow Controller ( MFC) inside )
  • Working Temp. : 5~45 ºC
  • Max. Pressure: 3x106 Pa
  • Accuracy: ±1.5% FS
  • Liner: ±0.5-1.5%F.S.
  • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 1~ 99 SCCM
    • Controller 2: 1~199 SCCM

Power
  • Voltage: AC 208 - 240V Single phase 50/60Hz
  • Power: 100 W in total
  • May order a 100W transformer to operate at 110VAC ( Click Pic below to order )

PLC Touch Screen

  • 6" color touchscreen control panel to make parameter setting easy.
  • Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. 
Mechanical Pressure Gauge Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve 316 Stainless Steel
Gas Pipeline
  • One stainless steel gas mixing tank is built-in
  • Internal pipeline: 1/4" O.D stainless steel
  • External pipeline: 1/4" O.D PTFE
  • Gas Mixing Tank: Φ80X120mm
  • Stop Valve & Fittings
    • 316 stainless steel needle valve, 
    • Φ1/4” Swagelok Tube Fitting
Compliance
  • All components are CE certified
  • NRTL (UL61010) or CSA certification is available at extra cost. 
Oxygen Monitoring ( Optional)
  • An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more:
Related Products
 CVD & PECVD                              Furnace Click pictures below to order bubbler or evaporator for CVD
                                                                  

 

You may also like

-65%NEW
Thumbnail 1

2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - GSLALD4

$49,998.00

$17,499.30

-65%NEW
Thumbnail 1

2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software - GSL-LCD

$7,995.00

$2,798.25

NEW
Thumbnail 1

1200°C Tube Furnace w/ Hi-Vacuum (1E-4 torr) & 3 Channel Gas Flow Station for CVD - OTF-1200X-HVC3-series

$35,998.00

-65%NEW
Thumbnail 1

1700C Tube Furnace with High Vacuum System (10^-4Torr) & (2-4 Ch optional) MFC Gas Mixer - GSL-1700X-4-HVC-LD

$49,998.00

$17,499.30

-65%NEW
Thumbnail 1

1200°C Three Zones Tube Furnace with High Vacuum Station (1.0E-4 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD

$46,998.00

$16,449.30

-65%NEW
Thumbnail 1

Three Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3 Channel Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge - OTF-1200X-III-80-F3LV

$25,995.00

$9,098.25

-65%NEW
Thumbnail 1

Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3-Ch Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge - OTF-1200X-II-F3LV

$18,986.00

$6,645.10

-65%NEW
Thumbnail 1

Three Zones Tube Furnace (4") with Vacuum Pump (1.0E-4 torr) + 9 Channel Digital Gas Flow-meters for CVD - OTF-1200X-4-III-9HV

$119,985.00

$41,994.75

-65%NEW
Thumbnail 1

Single Zone Tube Furnace (80 mm Dia, 1200C Max) with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge - OTF-1200X-80-F3LV

$14,985.00

$5,244.75

-65%NEW
Thumbnail 1

1200°C Max. Compact Auto-Sliding PECVD Furnace w/ 2" Tube and Vacuum Pump, - OTF-1200X-S50-PESL

$46,989.00

$16,446.15

-65%NEW
Thumbnail 1Thumbnail 2

Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS

$2,998.00

$1,049.30