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1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD

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1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD

OTF-1200X-III-R5-PECVD is a 1200°C plasma-enhanced three-zone rotary furnace for chemical vapor deposition (PECVD). It is designed for powder surface coating, e.g. core-shell particles, and powder surface cleaning. With the automatic powder feeding and collection system, it is able to simulate powder coating manufacturing process in lab-scale equipment. 
Features
  • Plasma-enhanced CVD with 13.56 MHz RF power supply
  • Three-zone rotary furnace with a heating length of 600 mm
  • Tumbling volume: 5000 ml. Effective volume @ 20-25%
  • 2-liter stainless steel powder feeding and collection system
  • Gas mixers with 4-channel MFCs 
  • Optional PC and touchscreen remote control
 
SPECIFICATIONS:

Power
  • Furnace                 208-240VAC, single phase, 50/60Hz, 4 kW
  • RF power supply   208-240VAC, single phase, 50/60Hz, 0.5 kW
  • Powder feeder      24VDC, 120 VAC, or 208-240VAC, single phase, 50/60Hz, 50W
  • Gas mixer             110-240VAC, single phase, 50/60 Hz, 50 W
  • Vacuum pump (optional): power is dependent upon the pumping capacity.

3-zone Rotary Furnace
  • Working temperature    ≤1100ºC
  • Heating rate                  ≤10°C/min
  • Heating element             NiCrAl: Mo
  • Heating length               600 mm  (150+300+150 mm three zones)
  • Temperature control      PID temperature control
  • Temp control accuracy   ±1°C
  • Rotary speed                  2-10 rpm
  • Tilting angle                   0-15°
Rotary Tube and Flange
  • Quartz tube Ø60×Ø130×1650 mm with mixing blades
  • Stainless steel magnetic fluid sealed swivels with gas inlet/outlet and KF25 or KF40 vacuum port
Plasma RF Power Supply
  • Output Power             5 -300W adjustable with ± 1% stability.
  • RF frequency              13.56 MHz ±0.005%
  • Automatic RF matching
  • Noise: <50 dB.
  • Cooling: Air cooling.

Gas Mixing Station

 
  • GSL-4Z-LCD
  • Touchscreen LCD monitor
  • Four mass flow controllers
    • MFC 1      1-500 sccm oxygen
    • MFC 2      1-500 sccm nitrogen
    • MFC 3      1-500 sccm hydrogen
    • MFC 4      1-500 sccm argon
  • Accuracy             ±1.5% F.S.
  • Port size             1/4" compression tube fitting
Powder Feeder and Collection Tank 

 
  • Powder feeder PF-1S, a motorized stainless steel powder feeder with built-in vibration.
  • The estimated feeding rate is about 0- 97 ml/minute. 
  • A stainless steel collection tank ( 2 Liter capacity ) is to collect powder without exposure to air. 
Laptop, software Control (Optional)
  • The software will integrate temperature control, gas MFC control, and Plasma control for remote operation
Compliance
  • CE Certified

 

$69,993.00

Original: $199,980.00

-65%
1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD—

$199,980.00

$69,993.00

Product Information

Shipping & Returns

Description

OTF-1200X-III-R5-PECVD is a 1200°C plasma-enhanced three-zone rotary furnace for chemical vapor deposition (PECVD). It is designed for powder surface coating, e.g. core-shell particles, and powder surface cleaning. With the automatic powder feeding and collection system, it is able to simulate powder coating manufacturing process in lab-scale equipment. 
Features
  • Plasma-enhanced CVD with 13.56 MHz RF power supply
  • Three-zone rotary furnace with a heating length of 600 mm
  • Tumbling volume: 5000 ml. Effective volume @ 20-25%
  • 2-liter stainless steel powder feeding and collection system
  • Gas mixers with 4-channel MFCs 
  • Optional PC and touchscreen remote control
 
SPECIFICATIONS:

Power
  • Furnace                 208-240VAC, single phase, 50/60Hz, 4 kW
  • RF power supply   208-240VAC, single phase, 50/60Hz, 0.5 kW
  • Powder feeder      24VDC, 120 VAC, or 208-240VAC, single phase, 50/60Hz, 50W
  • Gas mixer             110-240VAC, single phase, 50/60 Hz, 50 W
  • Vacuum pump (optional): power is dependent upon the pumping capacity.

3-zone Rotary Furnace
  • Working temperature    ≤1100ºC
  • Heating rate                  ≤10°C/min
  • Heating element             NiCrAl: Mo
  • Heating length               600 mm  (150+300+150 mm three zones)
  • Temperature control      PID temperature control
  • Temp control accuracy   ±1°C
  • Rotary speed                  2-10 rpm
  • Tilting angle                   0-15°
Rotary Tube and Flange
  • Quartz tube Ø60×Ø130×1650 mm with mixing blades
  • Stainless steel magnetic fluid sealed swivels with gas inlet/outlet and KF25 or KF40 vacuum port
Plasma RF Power Supply
  • Output Power             5 -300W adjustable with ± 1% stability.
  • RF frequency              13.56 MHz ±0.005%
  • Automatic RF matching
  • Noise: <50 dB.
  • Cooling: Air cooling.

Gas Mixing Station

 
  • GSL-4Z-LCD
  • Touchscreen LCD monitor
  • Four mass flow controllers
    • MFC 1      1-500 sccm oxygen
    • MFC 2      1-500 sccm nitrogen
    • MFC 3      1-500 sccm hydrogen
    • MFC 4      1-500 sccm argon
  • Accuracy             ±1.5% F.S.
  • Port size             1/4" compression tube fitting
Powder Feeder and Collection Tank 

 
  • Powder feeder PF-1S, a motorized stainless steel powder feeder with built-in vibration.
  • The estimated feeding rate is about 0- 97 ml/minute. 
  • A stainless steel collection tank ( 2 Liter capacity ) is to collect powder without exposure to air. 
Laptop, software Control (Optional)
  • The software will integrate temperature control, gas MFC control, and Plasma control for remote operation
Compliance
  • CE Certified

 

1200°C Max. 5" Rotary PE-CVD Tube Furnace w/ Feeding & Receiving - OTF-1200X-III-R5-PECVD | MTI Online Store