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1200°C Tube Furnace (3" ID) w/ Automatic Sliding of Internal Crucible - OTF-1200X-80-DVD

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1200°C Tube Furnace (3" ID) w/ Automatic Sliding of Internal Crucible - OTF-1200X-80-DVD

OTF-1200X-80-DVD is a 1200ºC and OD 80 mm tube furnace with an air-tight automatic sliding mechanism inside the crucible, which can move to the desired temperature position under the controlled atmosphere as sublimating source to achieve DVD or PVD for the substrate in the center of the furnace.

SPECIFICATIONS:

Furnace Feature
  • One high thermal conductivity Alumina flat sample holder (2" Lx1"W) is fixed on K type sample, and the thermal couple with the sample holder can be moved inside a quartz tube driven by a magnet manually to find a desirable temperature position inside the tube for evaporation or deposition.
  • One NIST-certified precision temperature monitor is connected to the thermal couple and sample holder via feedthrough on the vacuum flange.
  • One magnet is embedded inside the thermal block, and another magnet is placed outside the tube. move the outside magnet can move the sample holder with the thermal couple inside the tube in or out
  • 30 segment programmable temperature controller is installed in a furnace to set up Max. working temperature up to 1200oC at the center of the furnace
  • One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application.
Furnace Power 
  • 110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when placing order )
  • 1.5 KW
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C ( continuous)
Max. Heating Rate
<= 20 °C/min
Heating Zone
  • Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
  • Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C 
  • You shall measure the furnace temperature profile for your own application before making film growth.
Temperature Controller
   
  • PID automatic control via solid-state relay with 30 steps programmable
  • Built-in Over Temperature and Thermocouple Failure Protection
  • Optional: The furnace may be operated by PC with installing a control module. Please order a MTS02-B control module at extra cost. 
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo


Tube Size
  • 2" quartz tube (50mm O.D x 44mm I.D x 1000mm L) 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • One small quartz boat is included for placing samples or evaporation materials.
Quartz Tube: 216 OD x 208 IDx 1020L mm( 8.5"OD x 8.2" x 40"L) for DIY Tube Furnace - EQ-QZTube-216FE                   Click here to choose other size crucibles
Vacuum Flanges
 
2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum portclick picture below to see details )
Vacuum Level
10-2torr (by mechanical pump)
 
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the end of the vacuum port ( click picture left to order )
  • You may consider ordering a quick connecting flange at extra cost.
  • You may order a multi-channel gas delivery system for DVD or CVD operation.
                         
Compliance
  • CE Certified
  • NRTL or CSA certification is available at extra cost. please click marks below to learn details )

Application Notes

Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum pressures only are safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube

 

$99,998.00
1200°C Tube Furnace (3" ID) w/ Automatic Sliding of Internal Crucible - OTF-1200X-80-DVD—
$99,998.00

Product Information

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Description

OTF-1200X-80-DVD is a 1200ºC and OD 80 mm tube furnace with an air-tight automatic sliding mechanism inside the crucible, which can move to the desired temperature position under the controlled atmosphere as sublimating source to achieve DVD or PVD for the substrate in the center of the furnace.

SPECIFICATIONS:

Furnace Feature
  • One high thermal conductivity Alumina flat sample holder (2" Lx1"W) is fixed on K type sample, and the thermal couple with the sample holder can be moved inside a quartz tube driven by a magnet manually to find a desirable temperature position inside the tube for evaporation or deposition.
  • One NIST-certified precision temperature monitor is connected to the thermal couple and sample holder via feedthrough on the vacuum flange.
  • One magnet is embedded inside the thermal block, and another magnet is placed outside the tube. move the outside magnet can move the sample holder with the thermal couple inside the tube in or out
  • 30 segment programmable temperature controller is installed in a furnace to set up Max. working temperature up to 1200oC at the center of the furnace
  • One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application.
Furnace Power 
  • 110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when placing order )
  • 1.5 KW
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C ( continuous)
Max. Heating Rate
<= 20 °C/min
Heating Zone
  • Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
  • Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C 
  • You shall measure the furnace temperature profile for your own application before making film growth.
Temperature Controller
   
  • PID automatic control via solid-state relay with 30 steps programmable
  • Built-in Over Temperature and Thermocouple Failure Protection
  • Optional: The furnace may be operated by PC with installing a control module. Please order a MTS02-B control module at extra cost. 
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo


Tube Size
  • 2" quartz tube (50mm O.D x 44mm I.D x 1000mm L) 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • One small quartz boat is included for placing samples or evaporation materials.
Quartz Tube: 216 OD x 208 IDx 1020L mm( 8.5"OD x 8.2" x 40"L) for DIY Tube Furnace - EQ-QZTube-216FE                   Click here to choose other size crucibles
Vacuum Flanges
 
2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum portclick picture below to see details )
Vacuum Level
10-2torr (by mechanical pump)
 
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the end of the vacuum port ( click picture left to order )
  • You may consider ordering a quick connecting flange at extra cost.
  • You may order a multi-channel gas delivery system for DVD or CVD operation.
                         
Compliance
  • CE Certified
  • NRTL or CSA certification is available at extra cost. please click marks below to learn details )

Application Notes

Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum pressures only are safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube