OTF-1200X-RTP-5S is a 5” sliding furnace with resistance heating and an electric sliding motor for rapid heating and cooling. It is capable of achieving a max. heating cooling rate 2°C/4°C per second and anneals wafer of max 4" diameter up to 1200°C.
SPECIFICATIONS
Furnace Structure
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- A double-layer steel casing with air cooling that ensures the furnace shell ≤60.
- Separated temperature control unit for remote operation
- 300 mm length heating zone with 100 mm constant temperature zone with +/- 3ºC
- One set of sliding rails is installed which allows the furnace to move from one side to the other side. Automatically at variable speeds using the control knob is optional at extra cost.
- Vacuum flanges and the digital vacuum gauge are installed for immediate use.
- Quartz tube: 5" quartz tube (130mm O.D x 120mm I.D x 1100mmL) is included with airtight flanges
- Annealing wafer up to 4" diameter max. with quartz boat
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Power
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- AC 208-240V Single Phase, 50/60 Hz
- 3 KW
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Working Temperature
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- Maximum:1200< 0.5 hrs
- Continuous: 1100 or less
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Sliding Control
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- Dual sliding rails made of Cr plated steel
- Sliding rail length: 1200 m
- Sliding Range: 450mm
- Optional: Automatic sliding is driven by DC motor. is controlled by the temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.
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Temperature Controller
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- Two PID automatic controllers with 30 programmable segments for control of heating & cooling rate, and dwell time.
- Built-in overheating & thermocouple broken protection.
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- PC Control:
- An MTS-02 control module is included for PC control on this furnace.
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A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.
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Heating and Cooling Rate
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- Recommend Heating Rate for heating elements protection: ≤ 20°C/min
- Rapid heating is achieved by sliding a preheated sample area
- Max. heating rate is about 2ºC/S
- Rapid cooling is achieved by sliding the heated furnace away from the sample area at room temperature.
- Max. cooing rate is about 4ºC/S
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Vacuum Flanges
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- Stainless steel vacuum flanges are installed on both ends of the tube.
- Left flange:
- One Φ6.35 inlet with a pressure gauge
- One stop valve.
- One port for armored thermocouple
- Right flange:
- One KF25 port
- One gas outlet with a stop valve.
- One port for armored thermocouple
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Vacuum Level
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- Limited by a vacuum pump
- 10^-2 torr can be achieved by a mechanical pump
- 10^-5 torr can be reached by a molecular pump
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  The vacuum pump is not included, please order separately
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Compliance
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- CE Certified
- NRTL certification(UL61010) or CSA certification is available at extra cost.
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Application Notes
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Vacuum pressures may only be safely used up to 1000°C
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