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1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for CVD - OTF-1200X-S-50-DFSL

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1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for CVD - OTF-1200X-S-50-DFSL

OTF-1200X-S-50-DFSL is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery, and RF Plasma generator are available to build a flexible CVD system easily at a low cost.

SPECIFICATIONS

Furnace Structure
  • Both furnaces are double-layer steel structures with 1200°C max. working temperature
  • Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone
  • One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
  • Hermetic flanges are installed for immediate use.

Power of furnace
  •  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
  •  2.5 KW in total

Max. Temperature
  • 1200°C (<1 hour)

Continuous Temperature
  • 1100°C

Heating & Cooling Rates
Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
 0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
Note:
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length
  • 200mm( ~8") for each furnace

Constant Temperature Zone
  • 60 mm (+/-3°C @ 800°C)

Heating Elements
  • Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

Quartz Tube: 216 OD x 208 IDx 1020L mm( 8.5"OD x 8.2" x 40"L) for DIY Tube Furnace - EQ-QZTube-216FE
  • Quartz tube
  • 50mm O.D x 44mm I.D x1500 mm Length 
    Optional: S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost

Temperature Controller
  • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without an attendant.
  • Two K-type thermal couples are included. 
  • Optional:
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • We recommend you order a computer (laptop) from us to avoid software installation problems. For more information please click here

Temperature Accuracy
  • +/ - 1°C

 Vacuum Flanges
  • Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy-duty support. (Pic. 1)
  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost. ( click Pic. 2), and water cold flange (Pic. 3)
  •  Pic. 1  Pic. 2 Pic. 3

 Sliding Rails 
  • Double sliding rails
  • Sliding length: 1200 mm
  • Two slide-stopping clamps are included for holding the position of the furnaces.

 Vacuum Level 
  • Limited by pump ( pump is not included, click on pictures to order )
    • 10E-5 torr can be achieved via molecular pump
    • 10E-2 torr can be achieved via a mechanical pump.
 

Optional for upgrade
  • 1-9 channel gas mixing and delivery models is available ( click picture 2 in below to order )
  • 300W RF plasma generator for plasma enhanced processing is available upon request 
  • You may need a cold trap to condense the exhaust gas
Pic. 1Pic. 2 Pic. 3 Pic. 4Pic. 5

Compliance
  • CE Certified
  • NRTL or CSA certification is available at extra cost ($3500.00).

Application Notes


Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.

Warning
  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gear such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

 

$11,998.00
1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for CVD - OTF-1200X-S-50-DFSL—
$11,998.00

Product Information

Shipping & Returns

Description

OTF-1200X-S-50-DFSL is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery, and RF Plasma generator are available to build a flexible CVD system easily at a low cost.

SPECIFICATIONS

Furnace Structure
  • Both furnaces are double-layer steel structures with 1200°C max. working temperature
  • Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone
  • One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
  • Hermetic flanges are installed for immediate use.

Power of furnace
  •  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
  •  2.5 KW in total

Max. Temperature
  • 1200°C (<1 hour)

Continuous Temperature
  • 1100°C

Heating & Cooling Rates
Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
 0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
Note:
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length
  • 200mm( ~8") for each furnace

Constant Temperature Zone
  • 60 mm (+/-3°C @ 800°C)

Heating Elements
  • Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

Quartz Tube: 216 OD x 208 IDx 1020L mm( 8.5"OD x 8.2" x 40"L) for DIY Tube Furnace - EQ-QZTube-216FE
  • Quartz tube
  • 50mm O.D x 44mm I.D x1500 mm Length 
    Optional: S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost

Temperature Controller
  • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without an attendant.
  • Two K-type thermal couples are included. 
  • Optional:
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • We recommend you order a computer (laptop) from us to avoid software installation problems. For more information please click here

Temperature Accuracy
  • +/ - 1°C

 Vacuum Flanges
  • Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy-duty support. (Pic. 1)
  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost. ( click Pic. 2), and water cold flange (Pic. 3)
  •  Pic. 1  Pic. 2 Pic. 3

 Sliding Rails 
  • Double sliding rails
  • Sliding length: 1200 mm
  • Two slide-stopping clamps are included for holding the position of the furnaces.

 Vacuum Level 
  • Limited by pump ( pump is not included, click on pictures to order )
    • 10E-5 torr can be achieved via molecular pump
    • 10E-2 torr can be achieved via a mechanical pump.
 

Optional for upgrade
  • 1-9 channel gas mixing and delivery models is available ( click picture 2 in below to order )
  • 300W RF plasma generator for plasma enhanced processing is available upon request 
  • You may need a cold trap to condense the exhaust gas
Pic. 1Pic. 2 Pic. 3 Pic. 4Pic. 5

Compliance
  • CE Certified
  • NRTL or CSA certification is available at extra cost ($3500.00).

Application Notes


Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.

Warning
  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gear such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

 

1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for CVD - OTF-1200X-S-50-DFSL | MTI Online Store